Title:
MEMS光スイッチ
Document Type and Number:
Japanese Patent JP4002145
Kind Code:
B2
Inventors:
Kyoko Kotani
Application Number:
JP2002204517A
Publication Date:
October 31, 2007
Filing Date:
July 12, 2002
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
G02B26/08
Domestic Patent References:
| JP2002182131A | ||||
| JP2002082270A | ||||
| JP2001305376A | ||||
| JP2001337247A |
Attorney, Agent or Firm:
Miaki Kametani