Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4004496
Kind Code:
B2
Inventors:
Takamasa Sakai
Sadao Hirae
Sadao Hirae
Application Number:
JP2004299054A
Publication Date:
November 07, 2007
Filing Date:
October 13, 2004
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; H01L21/304
Domestic Patent References:
| JP10112453A | ||||
| JP5082494A | ||||
| JP3084066U |
Attorney, Agent or Firm:
Tsutomu Sugiya