Title:
完全密閉型気液洗浄装置及び洗浄方法
Document Type and Number:
Japanese Patent JP4011176
Kind Code:
B2
Inventors:
Kusuhara Masaki
Application Number:
JP2765798A
Publication Date:
November 21, 2007
Filing Date:
February 09, 1998
Export Citation:
Assignee:
Watanabe Shoko Co., Ltd.
International Classes:
B08B3/08; H01L21/304; B08B3/10
Domestic Patent References:
| JP6342780A | ||||
| JP6269750A | ||||
| JP1140631A | ||||
| JP4290432A | ||||
| JP7045574A |
Attorney, Agent or Firm:
Hisao Fukumori