Title:
オゾンガス供給制御方法
Document Type and Number:
Japanese Patent JP4017807
Kind Code:
B2
Inventors:
Kadokawa Noriaki
Nobuyuki Motoyama
Kazutaka Takahashi
Norimasa Nonaka
Yoshihiko Mori
Kinzo Isomura
Kenji Nakatani
Kenichiro Mizuno
Nobuyuki Motoyama
Kazutaka Takahashi
Norimasa Nonaka
Yoshihiko Mori
Kinzo Isomura
Kenji Nakatani
Kenichiro Mizuno
Application Number:
JP2000149918A
Publication Date:
December 05, 2007
Filing Date:
May 22, 2000
Export Citation:
Assignee:
Fuji Electric Holdings Co., Ltd.
Isomura Hosui Kiki Co., Ltd.
JFE Engineering Corporation
Asahi Kasei Chemicals Corporation
Isomura Hosui Kiki Co., Ltd.
JFE Engineering Corporation
Asahi Kasei Chemicals Corporation
International Classes:
C02F1/44; C02F1/78
Domestic Patent References:
| JP11277081A | ||||
| JP2000107777A |
Foreign References:
| WO2000027510A1 |
Attorney, Agent or Firm:
Iwao Yamaguchi
Yoshihide Komada
Kiyoshi Matsuzaki
Yoshihide Komada
Kiyoshi Matsuzaki