Title:
単結晶保持装置
Document Type and Number:
Japanese Patent JP4026694
Kind Code:
B2
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Inventors:
Kurosaka Nori
Junsuke Tomioka
Masakazu Kobayashi
Yoshimoto Akihiro
Oshishitoshi
Kazuhiro Mimura
Hiroshi Kadota
Hiroshi Yoshinada
Kenji Okamura
Junsuke Tomioka
Masakazu Kobayashi
Yoshimoto Akihiro
Oshishitoshi
Kazuhiro Mimura
Hiroshi Kadota
Hiroshi Yoshinada
Kenji Okamura
Application Number:
JP5130198A
Publication Date:
December 26, 2007
Filing Date:
February 18, 1998
Export Citation:
Assignee:
sumco tech xiv Co., Ltd.
International Classes:
C30B15/30; C30B29/06; H01L21/208
Domestic Patent References:
JP11100291A |
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata
Yoshiyuki Obata