Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4027288
Kind Code:
B2
Inventors:
Takashi Izuda
Application Number:
JP2003300009A
Publication Date:
December 26, 2007
Filing Date:
August 25, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B65G49/04; H01L21/306; H01L21/677; H01L21/68
Domestic Patent References:
| JP2096334A | ||||
| JP11168083A | ||||
| JP7230981A | ||||
| JP5079607U |
Attorney, Agent or Firm:
Tsutomu Sugiya