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Title:
薄膜形成装置および薄膜形成方法
Document Type and Number:
Japanese Patent JP4043010
Kind Code:
B2
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Inventors:
Tsutomu Ueyama
Iseki Ide
Application Number:
JP2001296037A
Publication Date:
February 06, 2008
Filing Date:
September 27, 2001
Export Citation:
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Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/1345; H01L21/312; H01L21/768; H01L23/12; H01L23/522
Domestic Patent References:
JP5144973A
JP60182138A
Attorney, Agent or Firm:
Mio Kawasaki
Inaoka cultivation



 
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