Title:
水冷チャンバ及びこれを用いた気相成長成膜装置並びに該水冷チャンバの製造方法
Document Type and Number:
Japanese Patent JP4043026
Kind Code:
B2
Inventors:
Hiroyuki Homma
Masakazu Kobayashi
Kazuo Iguchi
Suzuki Riichi
Masakazu Kobayashi
Kazuo Iguchi
Suzuki Riichi
Application Number:
JP2002334802A
Publication Date:
February 06, 2008
Filing Date:
November 19, 2002
Export Citation:
Assignee:
Covalent Materials Co., Ltd.
Giken Technology Co., Ltd.
Giken Technology Co., Ltd.
International Classes:
C23C16/44; H01L21/205
Domestic Patent References:
| JP5029448A | ||||
| JP4135955U | ||||
| JP2003257872A | ||||
| JP62278270A | ||||
| JP4073570A |
Attorney, Agent or Firm:
Kinoshita Shigeru