Title:
基板搬送装置及び基板処理装置
Document Type and Number:
Japanese Patent JP4043029
Kind Code:
B2
Abstract:
PURPOSE: A substrate conveying device and a substrate processing device are provided to accurately convey a substrate without generating conveyance badness in which an arm is bent or the synchronization of the arm is not fitted. CONSTITUTION: Two supporting parts(81a,81b) are installed in conveying robots(71-74) to be opposite at a certain interval. Long arms(91a,91b) and short arms(94a,94b) are installed in the conveying robots and are supported by the supporting parts to hold a substrate. It is solved that the long arms and the short arms are bent. The long arms and the short arms accurately hold the substrate.
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Inventors:
Yasuo Sarai
Application Number:
JP2003039452A
Publication Date:
February 06, 2008
Filing Date:
February 18, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/06; G03F7/30; G02F1/13; H01L21/027; H01L21/677; H01L21/68
Domestic Patent References:
| JP2002302248A | ||||
| JP2002012321A | ||||
| JP11254374A | ||||
| JP2000208587A | ||||
| JP11147612A | ||||
| JP2038740U |
Attorney, Agent or Firm:
Junichi Omori