Title:
薄膜トランジスタの製造方法
Document Type and Number:
Japanese Patent JP4053326
Kind Code:
B2
Inventors:
Akihiro Takami
Ishida Yuchika
Yuki Matsuura
Ishida Yuchika
Yuki Matsuura
Application Number:
JP2002087569A
Publication Date:
February 27, 2008
Filing Date:
March 27, 2002
Export Citation:
Assignee:
Toshiba Matsushita Display Technology Co., Ltd.
International Classes:
H01L21/3065; H01L21/336; H01L29/786
Domestic Patent References:
| JP2001264813A | ||||
| JP2001077087A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Takeshi Sekine
Hakozaki Yukio
Takahashi
Akaoka Akira
Jun Okazawa
Tomoya Deguchi
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Takeshi Sekine
Hakozaki Yukio
Takahashi
Akaoka Akira
Jun Okazawa
Tomoya Deguchi