Title:
光硬化性オルガノポリシロキサン組成物
Document Type and Number:
Japanese Patent JP4064172
Kind Code:
B2
Inventors:
Hiroshige Okinoshima
Tsutomu Kashiwagi
Shinsuke Yamaguchi
Tsutomu Kashiwagi
Shinsuke Yamaguchi
Application Number:
JP2002200068A
Publication Date:
March 19, 2008
Filing Date:
July 09, 2002
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/075; C08F299/08; C08G77/20; G03F7/027; H01L21/027
Domestic Patent References:
| JP63117024A | ||||
| JP726146A | ||||
| JP6414226A | ||||
| JP8311139A |
Attorney, Agent or Firm:
Shuji Iwamiya