Title:
モノクロメータ付走査形電子顕微鏡
Document Type and Number:
Japanese Patent JP4071473
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electron microscope with a practical monochromator which can increase the image resolution by monochromatizing the energy of an irradiation electron beam and reducing the diameter of a light spot while decreasing chromatic aberration. SOLUTION: The monochromator arranged in between a first condenser lens 4 and a second condenser lens 13 is constituted of two sector magnetic fields 6, 7 in a fore stage, two sector magnetic fields 9, 10 in a rear stage, and a slit 8. The slit 8 is arranged on a mirror-symmetry plane in the intermediate part between the sector magnetic fields 6, 7 in the fore stage and the sector magnetic fields 9, 10 in the rear stage, and limits various energy of electron beams diverged from the crossover of the first condenser lens in the sector magnetic field in the fore stage. The sector magnetic fields 9, 10 of rear stage spatially converges the diverged electron beam again to be an object point of the second condenser lens 13 while making energy dispersion nondispersive.
Inventors:
Shunriku Taya
Tadashi Otaka
Atsushi Ohara
Yoichi Ose
Hideo Tosho
Tadashi Otaka
Atsushi Ohara
Yoichi Ose
Hideo Tosho
Application Number:
JP2001328694A
Publication Date:
April 02, 2008
Filing Date:
October 26, 2001
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01R31/302; H01J37/05; G21K5/04; H01J37/153; H01L21/66
Domestic Patent References:
| JP2000228162A | ||||
| JP4233145A | ||||
| JP20016601A | ||||
| JP10199458A | ||||
| JP200123558A | ||||
| JP5290800A | ||||
| JP200152644A |
Attorney, Agent or Firm:
Kasuga Toshiaki