Title:
塗布、現像装置及び塗布、現像装置の運転方法
Document Type and Number:
Japanese Patent JP4087328
Kind Code:
B2
Inventors:
Makio Higashi
Ryo Miyata
Ryo Miyata
Application Number:
JP2003397558A
Publication Date:
May 21, 2008
Filing Date:
November 27, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C9/12; H01L21/027; B05C9/14; B05C13/02; H01L21/677; H01L21/68
Domestic Patent References:
| JP2001077014A | ||||
| JP7171478A | ||||
| JP8255750A | ||||
| JP2002184671A |
Attorney, Agent or Firm:
Toshio Inoue
Mizuno Hiromi
Mizuno Hiromi