Title:
蒸着装置における蒸発源
Document Type and Number:
Japanese Patent JP4090039
Kind Code:
B2
Abstract:
PURPOSE: A vaporizing source in a vaporizer is provided to prevent a jamming of an outlet and to reduce a size of the vaporizing source, in order to increase a uniformity of the vaporization. CONSTITUTION: A vaporizing source in a vaporizer includes a heating aid portion(5) and a crevice cover portion(7). The vaporizing source is made by implementing a heater(2) on a furnace(1) containing a vaporizing material and heating the vaporizing material by the heater, thereby vaporizing the vaporizing material from an outlet on top of the furnace. The crevice cover portion is conductively heated by a conductive heater(6) which is formed successively adjacent to the auxiliary heater. The crevice cover portion is arranged at least around the outlet on top of the furnace. A heating temperature around the outlet on top of the furnace is raised.
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Inventors:
Yasuhide Hiraga
Application Number:
JP2003111991A
Publication Date:
May 28, 2008
Filing Date:
April 16, 2003
Export Citation:
Assignee:
Tokki Co., Ltd.
International Classes:
C23C14/24; H01L51/50; H05B33/10; H05B33/14
Domestic Patent References:
| JP3038367U | ||||
| JP2247374A | ||||
| JP1119663A | ||||
| JP61186471A |
Attorney, Agent or Firm:
Tsuyoshi Yoshii
Masae Yoshii
Masae Yoshii