Title:
クランプ機構及び処理装置
Document Type and Number:
Japanese Patent JP4106957
Kind Code:
B2
Inventors:
Masayuki Tanaka
Sumi Tanaka
Sumi Tanaka
Application Number:
JP2002132021A
Publication Date:
June 25, 2008
Filing Date:
May 07, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; H01L21/68
Domestic Patent References:
| JP2001525997A | ||||
| JP6204316A | ||||
| JP7293236A | ||||
| JP5041178A | ||||
| JP2000049210A | ||||
| JP2001102438A |
Attorney, Agent or Firm:
Akihiro Asai