Title:
半導体装置
Document Type and Number:
Japanese Patent JP4124168
Kind Code:
B2
Inventors:
Noritaka Anzai
Application Number:
JP2004182031A
Publication Date:
July 23, 2008
Filing Date:
June 21, 2004
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
H01L21/3205; H01L23/52; H01L23/12
Domestic Patent References:
| JP2001217349A | ||||
| JP2001024084A |
Attorney, Agent or Firm:
Takashi Ogaki