Title:
ウェーハの金属汚染防止装置および金属汚染量測定方法
Document Type and Number:
Japanese Patent JP4124412
Kind Code:
B2
Inventors:
Kiyoshi Nagai
Kei Matsumoto
Harumi Shibata
Kumiko Yanagi
Hirohito Uchiyama
Kei Matsumoto
Harumi Shibata
Kumiko Yanagi
Hirohito Uchiyama
Application Number:
JP2001331034A
Publication Date:
July 23, 2008
Filing Date:
October 29, 2001
Export Citation:
Assignee:
sumco tech xiv Co., Ltd.
International Classes:
G01N23/223; H01L21/66
Domestic Patent References:
| JP2001208743A | ||||
| JP200199766A |
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata
Yoshiyuki Obata