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Title:
成膜方法
Document Type and Number:
Japanese Patent JP4133490
Kind Code:
B2
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Inventors:
Toshio Goto
Masaru Hori
Application Number:
JP2003081629A
Publication Date:
August 13, 2008
Filing Date:
March 24, 2003
Export Citation:
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Assignee:
後藤 俊夫
堀 勝
東京エレクトロン株式会社
International Classes:
C23C16/44; H01L21/205
Domestic Patent References:
JP7094130A
JP10055963A
JP63108656A
Attorney, Agent or Firm:
Masaki Yamakawa



 
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