SF6分解ガスを含むSF6ガスの精製処理方法 - Taiyo Nippon Sanso Kanto Co., Ltd.

Title:

SF6分解ガスを含むSF6ガスの精製処理方法

Document Type and Number:

Japanese Patent JP4138110

Kind Code:

B2

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Inventors:

Junmon Terakado
Shinji Watanabe
Kozo Oya
Eisaku Mogi
Moriyuki Fukushima

Application Number:

JP32947398A

Publication Date:

August 20, 2008

Filing Date:

November 19, 1998

Export Citation:

Assignee:

Taiyo Nippon Sanso Kanto Co., Ltd.
Kanto Denka Kogyo Co., Ltd.

International Classes:

B01D53/04; C01B17/45; B01D53/14

Domestic Patent References:

JP58112021A
JP10297910A

Attorney, Agent or Firm:

Kazuo Shamoto
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Takeshi Kano

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