Title:
基板めっき装置
Document Type and Number:
Japanese Patent JP4162298
Kind Code:
B2
Inventors:
Akihisa Hongo
Naoaki Kogure
Hiroaki Inoue
Naoaki Kogure
Hiroaki Inoue
Application Number:
JP23949098A
Publication Date:
October 08, 2008
Filing Date:
August 11, 1998
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C23C18/16; H01L21/288; C25D7/12; C25D17/00; C25D19/00; C25D21/08; H01L21/768
Domestic Patent References:
| JP7321111A | ||||
| JP10012619A | ||||
| JP8162758A | ||||
| JP7003498A | ||||
| JP2013769U | ||||
| JP2000031095A | ||||
| JP5182965A | ||||
| JP5140790A |
Foreign References:
| WO1997022733A1 |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Susumu Ohata
Shintaro Hotta
Susumu Ohata