Title:
研磨液組成物
Document Type and Number:
Japanese Patent JP4187206
Kind Code:
B2
Inventors:
Yasuhiro Yoneda
Toshiya Hagiwara
Toshiya Hagiwara
Application Number:
JP2003318707A
Publication Date:
November 26, 2008
Filing Date:
September 10, 2003
Export Citation:
Assignee:
Kao Corporation
International Classes:
C09K3/14; B24B37/00; H01L21/304
Domestic Patent References:
| JP2000204353A | ||||
| JP2000239651A | ||||
| JP2004107421A | ||||
| JP2004107368A | ||||
| JP2004107369A |
Attorney, Agent or Firm:
Yoshinori Hosoda