Title:
リソグラフィー用ペリクル
Document Type and Number:
Japanese Patent JP4202547
Kind Code:
B2
Inventors:
Ryo Shirasaki
Shu Kashida
Shu Kashida
Application Number:
JP24394399A
Publication Date:
December 24, 2008
Filing Date:
August 30, 1999
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
H01L21/027; C08F114/18; G03F1/62
Domestic Patent References:
| JP3168642A | ||||
| JP10228099A |
Foreign References:
| WO1998036324A1 |
Attorney, Agent or Firm:
Mikio Yoshimiya