Title:
アラインメントデバイス及び有機材料の蒸着方法
Document Type and Number:
Japanese Patent JP4216531
Kind Code:
B2
Abstract:
An alignment device (10) for permitting a deposition mask (12) to be positioned relative to a substrate to facilitate deposition of organic material on to the substrate which will be part of an organic light emitting device, including a base (14) having a first set of alignment pins (16) and a second set of alignment pins (18); a plate (20) secured to the base (14); a frame (22) having an opening (24) aligned with the plate (20), the frame (22) being formed with a first set of alignment pin receiving holes (17a,17b) corresponding to the position of the first set of pins (16) so that the frame is removably mounted to the base (14); the deposition mask (12) and positioned on the plate (20); a transparent flat plate (28) contacting the second set of pins (18) and the deposition mask (12) and being sized to expose portions of the deposition mask; and securing the exposed portions of the deposition mask to the frame.
Inventors:
Thomas Kenyon Clark
Application Number:
JP2002185579A
Publication Date:
January 28, 2009
Filing Date:
June 26, 2002
Export Citation:
Assignee:
Eastman Kodak Company
International Classes:
H05B33/10; C23C14/04; C23C14/24; H01L33/00; H01L51/40; H01L51/50; H01L51/56
Domestic Patent References:
| JP10204615A | ||||
| JP11106917A | ||||
| JP2001237073A | ||||
| JP2003017258A |
Attorney, Agent or Firm:
Takashi Ishida
Jun Tsuruta
Koji Takeuchi
Masaya Nishiyama
Higuchi Souji
Jun Tsuruta
Koji Takeuchi
Masaya Nishiyama
Higuchi Souji