Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4222876
Kind Code:
B2
Inventors:
Masanobu Sato
Sadao Hirae
Shota Yasuda
Sadao Hirae
Shota Yasuda
Application Number:
JP2003151249A
Publication Date:
February 12, 2009
Filing Date:
May 28, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05B1/34; H01L21/304; B05B7/06
Domestic Patent References:
| JP2002270564A | ||||
| JP4021551B2 | ||||
| JP10197145A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki