Title:
モノリシックサーマルインクジェットプリントヘッドの製造方法
Document Type and Number:
Japanese Patent JP4226691
Kind Code:
B2
Abstract:
A method and structure are described for a monolithic roofshooter ink jet printhead which has nozzles (32) and ink channels (34) formed in a polyimide layer (30) overlying a silicon substrate (12). Resistor heaters (16), addressing logic circuitry (18,20), and ink inlets (36) are formed in the silicon substrate (12). A fabrication process, simple and monolithic, is performed at low temperatures resulting in a structure which has nozzle diameters of 30 mu separated by distances of 10 mu or less. This structure results in a printhead which has a printing resolution of 630 dpi.
Inventors:
Jin Kang Chen
Beachen Tsai
Beachen Tsai
Application Number:
JP19876198A
Publication Date:
February 18, 2009
Filing Date:
July 14, 1998
Export Citation:
Assignee:
XEROX CORPORATION
International Classes:
B41J2/05; B41J2/16; B41J2/14
Domestic Patent References:
| JP9193405A | ||||
| JP7276646A | ||||
| JP9156103A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori