ウェーハ検査装置およびウェーハ検査方法

Title:

ウェーハ検査装置およびウェーハ検査方法

Document Type and Number:

Japanese Patent JP4230184

Kind Code:

B2

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Inventors:

Hirotoshi Terada
Toru Matsumoto

Application Number:

JP2002254301A

Publication Date:

February 25, 2009

Filing Date:

August 30, 2002

Export Citation:

Assignee:

Hamamatsu Photonics Co., Ltd.

International Classes:

G01B11/00; G01N21/956; G01N27/82; G01R33/035; H01L21/66

Domestic Patent References:

Attorney, Agent or Firm:

Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki

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