Title:
P含有W粉末およびこれを用いて製造されたスパッタリング焼結ターゲット
Document Type and Number:
Japanese Patent JP4238768
Kind Code:
B2
Inventors:
Hirofumi Yoshimoto
Susumu Morita
Susumu Morita
Application Number:
JP2004122821A
Publication Date:
March 18, 2009
Filing Date:
April 19, 2004
Export Citation:
Assignee:
Nippon Shinkin Co., Ltd.
International Classes:
B22F1/00; B22F3/15; C22C27/04; C23C14/34
Domestic Patent References:
| JP2003193225A | ||||
| JP2003055758A | ||||
| JP2001295036A | ||||
| JP8199280A | ||||
| JP2002180112A |
Attorney, Agent or Firm:
Kazuo Tomita
Kutaro Kamoi
Kutaro Kamoi