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Title:
透過電子顕微鏡
Document Type and Number:
Japanese Patent JP4255843
Kind Code:
B2
Abstract:

To provide a compact transmission electron microscope allowing a fluorescent plate to be disposed on an optical axis of an electron beam and to be retreated from the electron beam optical axis.

When a TEM image observed on the fluorescent plate 11 is photographed by using a photographic film 12, the fluorescent plate 11 is retreated from the electron beam optical axis O. In evacuating the fluorescent plate 11, a fluorescent plate support part 14a is rotated counterclockwise (counterclockwise in view from the side of a fluorescent plate driving part 14b) around a driving axis (r) by the fluorescent driving part 14b as shown by a dotted line in Figure (c). In this case, it is rotated by around 90°. As a result, the fluorescent plate 11 fixed to a tip of the crank-like fluorescent plate support part 14a is evacuated from the electron beam optical axis O by moving it on a circumference S around the driving axis (r) as shown by the dotted line in Figure (c).

COPYRIGHT: (C)2005,JPO&NCIPI


Inventors:
Shunji Deguchi
Application Number:
JP2004004959A
Publication Date:
April 15, 2009
Filing Date:
January 13, 2004
Export Citation:
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Assignee:
JEOL Ltd.
International Classes:
H01J37/26; H01J37/22; H01J37/28
Domestic Patent References:
JP49122751U
JP53031955A
JP1174845U
JP2220339A
JP9223478A
JP2008282827A