結晶化膜の形成方法及びその装置

Title:

結晶化膜の形成方法及びその装置

Document Type and Number:

Japanese Patent JP4267585

Kind Code:

B2

Inventors:

Naoyuki Kobayashi
Kusama Hideaki
Junichi Tsukita

Application Number:

JP2005067466A

Publication Date:

May 27, 2009

Filing Date:

March 10, 2005

Export Citation:

Assignee:

Japan Steel Works, Ltd.

International Classes:

H01L21/20; H01L21/336; H01L29/786

Domestic Patent References:

Attorney, Agent or Firm:

Yuki Yokoi

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