Title:
基板搬送装置および基板搬送方法
Document Type and Number:
Japanese Patent JP4268318
Kind Code:
B2
Abstract:
A substrate carrying device reduces time necessary for conducting changing work for changing the types of flat panel displays or the like. A substrate support member ( 10 ) has a support body ( 11 ) provided with an outer peripheral part ( 11 a), which is joined to an inner peripheral part ( 21 b) of an extension support member ( 20 ) to connect the substrate support member ( 10 ) to the extension support member ( 20 ). Only by the substrate support member ( 10 ) is used for supporting a small glass substrate ( 41 ) to carry the small glass substrate ( 41 ). A combination of the substrate support member ( 10 ) and the extension support member ( 20 ) is used for supporting a large glass substrate ( 41' ) to carry the large glass substrate ( 41' ).
Inventors:
Shinichi Ogimoto
Application Number:
JP2000196586A
Publication Date:
May 27, 2009
Filing Date:
June 29, 2000
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B65G49/06; H01L21/677; H01L21/68; H01L21/687
Domestic Patent References:
| JP6080497A | ||||
| JP2284828A | ||||
| JP4040597U | ||||
| JP6260550A | ||||
| JP2000174102A | ||||
| JP2000012663A |
Attorney, Agent or Firm:
Kazuo Sato
Hiroyuki Nagai
Junpei Okada
Hiroyuki Nagai
Junpei Okada