Title:
エキシマレーザアニール装置、多結晶薄膜トランジスタの製造方法及び液晶表示素子の製造方法
Document Type and Number:
Japanese Patent JP4268700
Kind Code:
B2
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Inventors:
Hiroshi Mitsuhashi
Kawahisa Keito
Yuki Matsuura
Fujimura Nao
Kawahisa Keito
Yuki Matsuura
Fujimura Nao
Application Number:
JP9131498A
Publication Date:
May 27, 2009
Filing Date:
April 03, 1998
Export Citation:
Assignee:
Toshiba Matsushita Display Technology Co., Ltd.
International Classes:
G02F1/136; H01L21/268; G02F1/1368; H01L21/20; H01L21/336; H01L29/786
Domestic Patent References:
| JP4286318A | ||||
| JP62084511A | ||||
| JP2252234A | ||||
| JP3285326A |
Attorney, Agent or Firm:
Norio Ohu