Title:
測定機器用架台
Document Type and Number:
Japanese Patent JP4294716
Kind Code:
B2
Inventors:
Arimoto Kimihiko
Application Number:
JP2008167771A
Publication Date:
July 15, 2009
Filing Date:
June 26, 2008
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
H01L21/66; H01L21/02
Domestic Patent References:
| JP2004045040A | ||||
| JP2003037150A | ||||
| JP10163147A | ||||
| JP2003037043A | ||||
| JP2006128559A |
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai
Akiko Sato
Saito Shindai