Title:
プローブ解析システムのブロードバンド設計
Document Type and Number:
Japanese Patent JP4297645
Kind Code:
B2
Abstract:
A radio frequency (RF) probe analysis system (20) has a broadband design. The analysis system (20) includes a sampling unit (22) for generating digital power signals (26a, 26b, 50a, 50b) based on a plurality of analog signals (28, 30). The analog signals (28, 30) characterize power delivered from an RF power delivery system to a plasma chamber (13). The analysis system (20) further includes a digital processing unit (24) for generating a digital spectrum signal based on the digital power signals (26a, 26b, 50a, 50b). The sampling unit (22) simultaneously samples a first plurality of frequencies from the analog signals (28, 30) such that the digital spectrum signal defines signal levels for the first plurality of frequencies. The sampling unit (22) may also simultaneously sample a second plurality of frequencies from the analog signals (28, 30) such that the digital spectrum signal further defines signal levels for the second plurality of frequencies. The broadband architecture of the sampling unit enables closed loop control of power delivered to the camber (13) to tolerances.
Inventors:
David Jay. Cowmau
Application Number:
JP2002056657A
Publication Date:
July 15, 2009
Filing Date:
March 01, 2002
Export Citation:
Assignee:
MK Instruments, Inc.
International Classes:
G01R21/01; G01R23/16; H01J37/32; H01L21/3065
Domestic Patent References:
| JP62071869A | ||||
| JP4050668A | ||||
| JP8248070A | ||||
| JP8339896A | ||||
| JP11008095A |
Foreign References:
| WO1998024202A1 | ||||
| WO1998056210A1 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita
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