Title:
両面加工装置
Document Type and Number:
Japanese Patent JP4319092
Kind Code:
B2
Inventors:
Shinichiro Tsukahara
Akira Isobe
Okuma Kiyohiro
Akira Isobe
Okuma Kiyohiro
Application Number:
JP2004166255A
Publication Date:
August 26, 2009
Filing Date:
June 03, 2004
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B24B49/03; B24B7/17; B24B49/08; H01L21/304
Domestic Patent References:
| JP9201768A | ||||
| JP10000543A | ||||
| JP61152353A | ||||
| JP61025772A | ||||
| JP58066643A |
Attorney, Agent or Firm:
Tadahiko Ito
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