Title:
アクテイブマトリクス型表示装置用フォトマスク及びその製造方法
Document Type and Number:
Japanese Patent JP4339232
Kind Code:
B2
Inventors:
Takahashi Misa
Youichi Murayama
Hiroshi Mori
Atsushi Tobita
Kuniyoshi
Companion Kiyoto
Shusaku Kido
Youichi Murayama
Hiroshi Mori
Atsushi Tobita
Kuniyoshi
Companion Kiyoto
Shusaku Kido
Application Number:
JP2004342782A
Publication Date:
October 07, 2009
Filing Date:
November 26, 2004
Export Citation:
Assignee:
nec LCD Technology Co., Ltd.
Dai Nippon Printing Co.,Ltd.
Dai Nippon Printing Co.,Ltd.
International Classes:
G02F1/1368; G03F1/00; G03F1/68; H01L21/027; H01L21/336; H01L29/786
Domestic Patent References:
| JP2002334830A | ||||
| JP2002189281A | ||||
| JP2004177946A | ||||
| JP2000181048A | ||||
| JP7134396A | ||||
| JP6051492A | ||||
| JP7049410A | ||||
| JP2000075466A | ||||
| JP8123010A | ||||
| JP2004140239A | ||||
| JP2006078727A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Takashi Sasaki
Shuichi Fukuda
Takashi Sasaki