Title:
送液装置、基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP4347188
Kind Code:
B2
Inventors:
Takeshi Fukuchi
Moriwaki Sanzo
Kazuo Kise
Moriwaki Sanzo
Kazuo Kise
Application Number:
JP2004301190A
Publication Date:
October 21, 2009
Filing Date:
October 15, 2004
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; B05C5/02; B05C11/10; B05D3/00; F04B3/00; F04B53/14
Domestic Patent References:
| JP2000334355A | ||||
| JP4185353A | ||||
| JP2004281640A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita