マイクロ構造体の製造方法 - 株式会社デンソー

Title:

マイクロ構造体の製造方法

Document Type and Number:

Japanese Patent JP4353033

Kind Code:

B2

Inventors:

Kazuhiko Sugiura
Takeshi Fukada
Koji Muto

Application Number:

JP2004263756A

Publication Date:

October 28, 2009

Filing Date:

September 10, 2004

Export Citation:

Assignee:

株式会社デンソー

International Classes:

H01L29/84; G01P15/125

Attorney, Agent or Firm:

Yoji Ito
Takahiro Miura
Fumihiro Mizuno

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