Title:
ドライエッチング方法
Document Type and Number:
Japanese Patent JP4368244
Kind Code:
B2
More Like This:
Inventors:
Ishihara
Go Saito
Kenichi Kuwahara
Yasuhiro Nishimori
Kai Miomi
Go Saito
Kenichi Kuwahara
Yasuhiro Nishimori
Kai Miomi
Application Number:
JP2004146207A
Publication Date:
November 18, 2009
Filing Date:
May 17, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/28; H01L21/3065; H01L29/423; H01L29/49; H01L29/78
Domestic Patent References:
JP3083335A | ||||
JP2001284283A |
Foreign References:
US6518106 |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office