Title:
CSP基板保持部材及び該CSP基板保持部材が載置されるCSP基板用テーブル
Document Type and Number:
Japanese Patent JP4388640
Kind Code:
B2
Abstract:
Disclosed is a CSP plate holder for use in dicing a CSP plate into individual pellets and in transporting and putting them in a transport tray. The CSP plate holder is composed of a flat plate for sucking and fixedly holding a CSP plate thereon. The flat plate has pellet areas each allotted to each of the individual pellets. Each pellet area has a through hole for sucking and fixedly holding the pellet while the CSP plate is being diced. Each pellet area has at least one suction hole for sucking and fixedly holding the pellet while the CSP plate is being transported. The flat plate has duct passages permitting the suction holes to communicate with a suction source for applying a suction force to the pellet. In addition, the flat plate has at least one minute through hole made in each pellet area.
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Inventors:
Eiichi Yoshimura
Shinichi Namioka
Shinichi Namioka
Application Number:
JP25725699A
Publication Date:
December 24, 2009
Filing Date:
September 10, 1999
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/50; B28D5/00; H01L23/12; H01L21/301; H01L23/28
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Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Kyoko Kawamura