Title:
基板支持用エンドエフェクタ・アセンブリ
Document Type and Number:
Japanese Patent JP4406611
Kind Code:
B2
Abstract:
Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for supporting a quadrilateral substrate during substrate transfer includes an end effector having an inner edge support disposed on a first end and a first outer edge support disposed on a distal end. The first end of the end effector is adapted for coupling to a robot linkage. The first inner edge support has a face that is oriented parallel to and facing the face of the first outer edge support. This configuration of edge supports captures the substrate to the end effector thereby minimizing substrate slippage during transfer. In another embodiment, lateral guides may be utilized to further enhance capturing the substrate along the edges of the substrate open between the inner and outer edge supports.
Inventors:
Bronigan, Wendell, Tee.
Matsumoto, Takayuki
Sterling, William, N.
Lun, Billy, Sea.
Matsumoto, Takayuki
Sterling, William, N.
Lun, Billy, Sea.
Application Number:
JP2004563625A
Publication Date:
February 03, 2010
Filing Date:
December 15, 2003
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B65G49/06; B25J15/08; H01L21/677; H01L21/687
Domestic Patent References:
| JP8313856A | ||||
| JP7226377A | ||||
| JP2091958A | ||||
| JP9167756A | ||||
| JP2001298066A | ||||
| JP2001044259A | ||||
| JP5046036U | ||||
| JP8306761A | ||||
| JP10095529A | ||||
| JP6127621A | ||||
| JP11340302A | ||||
| JP5090381A | ||||
| JP7193114A | ||||
| JP11168129A |
Foreign References:
| WO1996042108A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Ikeda adult
Yuichi Yamada
Ikeda adult
Yuichi Yamada