Title:
プラズマ装置およびその陰電極
Document Type and Number:
Japanese Patent JP4431847
Kind Code:
B2
Inventors:
Iwao Ichikawa
Yamauchi Manabu
Yamauchi Manabu
Application Number:
JP2000193124A
Publication Date:
March 17, 2010
Filing Date:
June 27, 2000
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/3065; H05H1/46; C23F4/00; H01L21/205; H01L21/302
Domestic Patent References:
| JP61236137A | ||||
| JP4109619A | ||||
| JP63016625A | ||||
| JP5267436A | ||||
| JP10321608A | ||||
| JP61276322A | ||||
| JP2000228398A |
Attorney, Agent or Firm:
Osamu Matsumura