アブソリュートエンコーダ

Title:

アブソリュートエンコーダ

Document Type and Number:

Japanese Patent JP4433759

Kind Code:

B2

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Inventors:

Makoto Arai

Application Number:

JP2003359395A

Publication Date:

March 17, 2010

Filing Date:

October 20, 2003

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G01D5/30

Domestic Patent References:

Attorney, Agent or Firm:

Fuyuki Nagai
Takao Watanabe

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