Title:
高周波スパッタリング装置
Document Type and Number:
Japanese Patent JP4444387
Kind Code:
B2
Inventors:
Hajime Sahase
Masahito Ishihara
Masahito Ishihara
Application Number:
JP7280599A
Publication Date:
March 31, 2010
Filing Date:
March 17, 1999
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/34; C23C14/35
Domestic Patent References:
| JP8100257A |
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto
Sayori Seto