基板処理装置及びローダ装置及びアンローダ装置

Title:

基板処理装置及びローダ装置及びアンローダ装置

Document Type and Number:

Japanese Patent JP4450724

Kind Code:

B2

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Inventors:

Toshihiko Nishimura
Norio Wada

Application Number:

JP2004323756A

Publication Date:

April 14, 2010

Filing Date:

November 08, 2004

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

B65G49/06; B08B3/02; B65G49/07; H01L21/027; H01L21/304; H01L21/677; G02F1/13

Domestic Patent References:

Attorney, Agent or Firm:

Filial piety Sasaki

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