Title:
低誘電材料
Document Type and Number:
Japanese Patent JP4460884
Kind Code:
B2
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Inventors:
Teruhiko Kumada
Shinji Eiji
Tetsuya Yamamoto
Takuya Kamiyama
Shinji Eiji
Tetsuya Yamamoto
Takuya Kamiyama
Application Number:
JP2003401199A
Publication Date:
May 12, 2010
Filing Date:
December 01, 2003
Export Citation:
Assignee:
Mitsubishi Electric Corporation
Nippon Shokubai Co., Ltd.
Nippon Shokubai Co., Ltd.
International Classes:
C07F5/02; C08G79/08; H01B3/30; H01L21/318
Domestic Patent References:
| JP200115496A | ||||
| JP2003119289A | ||||
| JP2000340689A |
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Yasuo Nara