Title:
特に紫外放射線の、放電による放射源
Document Type and Number:
Japanese Patent JP4485943
Kind Code:
B2
Abstract:
The invention concerns a radiation source, comprising an anode ( 2 ), a cathode ( 3 ), an electric discharge gap ( 4 ) between the anode ( 2 ) and the cathode ( 3 ) and a gas input conduit ( 30 ) in the discharge gap ( 4 ). The gas input conduit ( 30 ) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit ( 30 ) is supplied with gas by a gas supply conduit ( 32 ), designed to form between its portion ( 42 ) connected to the gas input conduit ( 30 ) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit ( 30 ).
Inventors:
Kashon Shinl, Christoph
Dussar, Remi
Fleurier, Claude
Pouvesul, Jean-Michel
Robert, Eric
Viladrosa, Raymon
Dussar, Remi
Fleurier, Claude
Pouvesul, Jean-Michel
Robert, Eric
Viladrosa, Raymon
Application Number:
JP2004516885A
Publication Date:
June 23, 2010
Filing Date:
June 27, 2003
Export Citation:
Assignee:
Ecole Polytechnique/Dgar
Universite d'Orleans
Universite d'Orleans
International Classes:
G21K5/02; H01J61/52; H01L21/027; H01J61/56; H05H1/24
Domestic Patent References:
| JP11016843A |
Foreign References:
| WO2002007484A1 |
Other References:
ROBERT,EMERGING LITHOGRAPHIC TECHNOLOGIES V, PROCEEDINGS OF SPIE,2001年 8月,V4343,P566-575
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Masaya Nishiyama