Title:
窒化物半導体チップの製造方法
Document Type and Number:
Japanese Patent JP4493127
Kind Code:
B2
Inventors:
Yuzo Tsuda
Application Number:
JP25648399A
Publication Date:
June 30, 2010
Filing Date:
September 10, 1999
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L33/32; H01L33/06; H01L33/12; H01L33/40; H01S5/323; H01S5/343
Domestic Patent References:
| JP10275936A | ||||
| JP7131069A | ||||
| JP8222807A | ||||
| JP11163403A | ||||
| JP11177137A | ||||
| JP10335750A | ||||
| JP11004048A | ||||
| JP10027769A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Tabata Masao
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Tabata Masao