Title:
試料観察方法及び電子顕微鏡
Document Type and Number:
Japanese Patent JP4500646
Kind Code:
B2
Abstract:
To provide a method of observing testpieces wherein charged amount of the observation position can be controlled stably to a desired one, and provide an electron microscope by which this can be realized.
By controlling irradiation condition of primary electron beams 108 in which pre-charge is carried out according to conditions of the testpieces, the charge amount at the observation position is controlled by confirming that the charge amount at the observation position has become to have the desired amount from that of secondary electron signal detected by using an energy light filter 101b and two electron detectors 102a, 102b.
COPYRIGHT: (C)2006,JPO&NCIPI
Inventors:
Yuki Kojima
Osamu Nasu
Ueda Kazuhiro
Osamu Nasu
Ueda Kazuhiro
Application Number:
JP2004302725A
Publication Date:
July 14, 2010
Filing Date:
October 18, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/28; G01N23/225; H01J37/05; H01J37/20; H01J37/244; H01L21/66
Domestic Patent References:
| JP2001052642A | ||||
| JP2003100823A | ||||
| JP2000133194A | ||||
| JP2000200579A |
Foreign References:
| WO2001075929A1 | ||||
| WO2003007330A1 |
Attorney, Agent or Firm:
Yusuke Hiraki