Title:
窒化物半導体
Document Type and Number:
Japanese Patent JP4519693
Kind Code:
B2
Inventors:
Tetsuya Akasaka
Yasuyuki Kobayashi
Toshiki Makimoto
Yasuyuki Kobayashi
Toshiki Makimoto
Application Number:
JP2005093162A
Publication Date:
August 04, 2010
Filing Date:
March 28, 2005
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
H01L21/205
Domestic Patent References:
| JP2003060212A | ||||
| JP2002075873A | ||||
| JP8239752A | ||||
| JP11162848A | ||||
| JP2288371A | ||||
| JP10326911A | ||||
| JP2000022211A |
Attorney, Agent or Firm:
Yoshikazu Tani
Atsuhiro Hamanaka
Atsuhiro Hamanaka