Title:
梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
Document Type and Number:
Japanese Patent JP4522086
Kind Code:
B2
Abstract:
A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.
Inventors:
Takashi Ushijima
Mountain Saki Takeo
Makoto Terui
Kazuhiro Hayakawa
Mountain Saki Takeo
Makoto Terui
Kazuhiro Hayakawa
Application Number:
JP2003416843A
Publication Date:
August 11, 2010
Filing Date:
December 15, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/05; B41J2/14; B41J2/16; B81B1/00
Domestic Patent References:
| JP2001322278A | ||||
| JP11245413A | ||||
| JP2003130702A |
Attorney, Agent or Firm:
Akio Miyazaki
Nobuyuki Kaneda
Katsuhiro Ito
Ishibashi Masayuki
Nobuyuki Kaneda
Katsuhiro Ito
Ishibashi Masayuki